Reliability Physics 1985

Reliability Physics 1985

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Previous electrical characterization of the burned devices, also after their mounting on printed circuit boards, had revealed ... as the silicon nitride passivation layer were removed by means of heated nitric acid and CF4 plasma etching, respectively. Description of the devices and the electrical defects Fig. 1 a shows a part of an examined device taken by SEM and the wiring diagram of a memory cell (Fig.

Title:Reliability Physics 1985
Publisher: - 1985

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